School of Physics on Optical Metrology
Also this year the EOSAM will host a School of Physics on optical metrology, now arrived at its 3rd edition. This year the school is organized within the framework of the project BeCOMe https://www.ptb.de/empir2018/nc/become/home/, funded by the European Metrology Programme for Innnovation and Research (EMPIR). Registered participants will have the chance to attend lectures given by experts from academia, industry and national metrology institutes and the goal will be to outline the importance of optical measurement methods in our current society, especially to what concerns nanotechnologies.
The registration is open to students, who want to know more on job possibilities after finishing their studies, as well as to professionals who would like to learn on current and future developments in this intense area of research. An attendance diploma can be issued under request. Limited seating.
Opening 9:45 h (Omar El Gawhary, coordinator of the project BeCOMe)
Lecture #1 10:00 h – 11:30 h
Arie den Boef, Free University Amsterdam/ARCNL and ASML Fellow, The Netherlands
Optical wafer metrology concepts in advanced lithography
Lecture #2 14:00 h – 15:30 h
Ivano Ruo Berchera, Istituto Nazionale di Ricerca Metrologica (INRiM), Italy
Quantum metrology and Imaging with photons
Lecture #3 16:00 – 17: 30 h
Stefanie Kroker, Technische Universität Braunschweig and Physikalisch-Technische Bundesanstalt (PTB), Germany
Resonant nanophotonics systems for high-precision optical metrology
Close of the event (Omar El Gawhary)